|
Resolution: standard / high Figure 5.
Photographic images. (a) Si master mold, (b) hot-embossed fluorinated polymer-coated flexible PET film,
(c) imprinted resist patterns on flat Si substrates using hot-embossed PET film shown
in b, and (d) imprinted resist patterns on curved acryl substrates using hot-embossed
PET film shown in (b).
Shin et al. Nanoscale Research Letters 2011 6:458 doi:10.1186/1556-276X-6-458 |