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Fabrication of flexible UV nanoimprint mold with fluorinated polymer-coated PET film

Ju-Hyeon Shin, Seong-Hwan Lee, Kyeong-Jae Byeon, Kang-Soo Han, Heon Lee* and Kentaro Tsunozaki

Nanoscale Research Letters 2011, 6:458  doi:10.1186/1556-276X-6-458