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Fabrication of flexible UV nanoimprint mold with fluorinated polymer-coated PET film

Ju-Hyeon Shin1, Seong-Hwan Lee1, Kyeong-Jae Byeon1, Kang-Soo Han1, Heon Lee1* and Kentaro Tsunozaki2

Author affiliations

1 Department of Materials Science and Engineering, Korea University, Anam-dong 5-ga, Seongbuk-gu, Seoul 136-713, South Korea

2 Asahi Glass Co., Ltd., Research Center, 1150 Hazawa-cho, Kanagawa-ku, Yokohama-shi, Kanagawa 221-8755, Japan

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Citation and License

Nanoscale Research Letters 2011, 6:458  doi:10.1186/1556-276X-6-458

Published: 18 July 2011


UV curing nanoimprint lithography is one of the most promising techniques for the fabrication of micro- to nano-sized patterns on various substrates with high throughput and a low production cost. The UV nanoimprint process requires a transparent template with micro- to nano-sized surface protrusions, having a low surface energy and good flexibility. Therefore, the development of low-cost, transparent, and flexible templates is essential. In this study, a flexible polyethylene terephthalate (PET) film coated with a fluorinated polymer material was used as an imprinting mold. Micro- and nano-sized surface protrusion patterns were formed on the fluorinated polymer layer by the hot embossing process from a Si master template. Then, the replicated pattern of the fluorinated polymer, coated on the flexible PET film, was used as a template for the UV nanoimprint process without any anti-stiction coating process. In this way, the micro- to nano-sized patterns of the original master Si template were replicated on various substrates, including a flat Si substrate and curved acryl substrate, with high fidelity using UV nanoimprint lithography.