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Open Access Nano Express

Simultaneous fabrication of line defects-embedded periodic lattice by topographically assisted holographic lithography

Byung-Yeon Choi, Yusin Pak, Ki Seok Kim, Kwang-Ho Lee and Gun-Young Jung*

Author Affiliations

Department of Materials Science and Engineering Gwangju Institute of Science and Technology (GIST), 261 Cheomdan-gwagiro, Buk-gu, Gwangju 500-712, Republic of Korea

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Nanoscale Research Letters 2011, 6:449  doi:10.1186/1556-276X-6-449

Published: 12 July 2011

Abstract

We have demonstrated simultaneous fabrication of designed defects within a periodic structure. For rapid fabrication of periodic structures incorporating nanoscale line-defects at large area, topographically assisted holographic lithography (TAHL) technique, combining the strength of hologram lithography and phase-shift interference, was proposed. Hot-embossing method generated the photoresist patterns with vertical side walls which enabled phase-shift mask effect at the edge of patterns. Embossing temperature and relief height were crucial parameters for the successful TAHL process. Periodic holes with a diameter of 600 nm at a 1 μm-pitch incorporating 250 nm wide line-defects were obtained simultaneously.

Keywords:
hot-embossing; holographic lithography; phase-shift lithography; photonic crystal; defect generation