Figure 5.

Current-time anodization curves of an Al film on Si and on different PtSi/Si substrates (samples S-5 min, S-15 min, and S-30 min). In all cases, the Al film thickness was 500 nm. The anodization curve of sample Al/S-5 min is quite similar to that of Al/Si, while in the cases of samples Al/S-15 min and Al/S-30 min the current increases significantly when the PAA film reaches the underlying surface.