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Resolution: standard / high Figure 4.
Surface roughness for various e-beam deposition rates of Au. Various sampling areas were examined: the 10 and 100 μm2 regions are measured by AFM while the 1 mm2 region is the roughness yielded by ellipsometry [13].
Lepage et al. Nanoscale Research Letters 2011 6:388 doi:10.1186/1556-276X-6-388 |
