Figure 2.

SEM image of InN film. (a) SEM image of an InN film deposited on a Si substrate showing the aggregation of dendrite-like structures. Two spherical droplets are indicated on the film surface. (b) SEM image of the InN film deposited on a Si substrate showing the dendrite fractal structure. (c) EDXS of a droplet indicating that InN is formed in the plume.