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Resolution: standard / high Figure 1.
Schematic diagram of the PLD configuration. VC, stainless steel vacuum chamber; L, 157-nm laser beam; X, x-y-z-computer-controlled translation stage; T, high-purity indium foil; P, ablation plume; C, CaF2 focusing optics; W, CaF2 window; S, Si [100] substrate; Y, substrate holder stage; N, nitrogen inlet; TP, turbo molecular pump.
Sarantopoulou et al. Nanoscale Research Letters 2011 6:387 doi:10.1186/1556-276X-6-387 |