Table 1

EDS analysis of pore at different steps of the process.

Processing condition

Element

Wt%

At.%

Before FIB drilling

O

55.97

69.06

Si

44.03

30.94

After FIB drilling

O

55.60

68.73

Si

44.40

31.27

After heating

O

56.33

69.37

Si

43.67

30.63

The analysis showed no O depletion during the process. The weight and atomic percentages of the nanopore edges remained almost constant. No traces of hydrocarbons were found at any step.

Asghar et al. Nanoscale Research Letters 2011 6:372   doi:10.1186/1556-276X-6-372