Schematic representation of the device used in the simultaneous off-normal coating of the two micro-cantilevers. (a) General view showing the plasma and the cone with the two MCLs. (b) (Left) Magnification of the cone with the MCLs: the PA-MCL is parallel to the cone generatrix, and the PE-MCL is perpendicular to the cone generatrix. Each MCL is located at one end of the diameter of a circle, which is a circular section perpendicular to the axis of the cone. Note that the two MCLs travel through the plasma in exactly the same circumference. (b) (Right) Schematic picture of the MCLs indicating the coating plasma direction and the transverse (PA-MCL) or longitudinal (PE-MCL) nano-strings generated.
Madurga et al. Nanoscale Research Letters 2011 6:325 doi:10.1186/1556-276X-6-325