Three-dimensional reconstruction of SRSO/SiO2 multilayer containing SiNCs. a. Distribution of silicon and b. oxygen atoms in the analyzed volume. Each dot corresponds to one atom. Silicon atoms belonging to SiNCs are artificially magnified for clarity. Arrows indicate the location of SRSO layers. c. Cross-sectional view of a SRSO layer.
Roussel et al. Nanoscale Research Letters 2011 6:271 doi:10.1186/1556-276X-6-271