|
Resolution: standard / high Figure 6.
AFM images and cross-sectional curves of oxide lines on m-plane 4H-SiC obtained under
different scan speeds: (a) 8.376 μm/s; (b) 5.235 μm/s; (c) 2.094 μm/s; and (d) 1.047
μm/s.
Ahn et al. Nanoscale Research Letters 2011 6:235 doi:10.1186/1556-276X-6-235 |
