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Crystallographic plane-orientation dependent atomic force microscopy-based local oxidation of silicon carbide

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Jung-Joon Ahn, Yeong-Deuk Jo, Sang-Cheol Kim, Ji-Hoon Lee and Sang-Mo Koo^*

Nanoscale Research Letters 2011, 6:235 doi:10.1186/1556-276X-6-235

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