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Relationship between structural changes, hydrogen content and annealing in stacks of ultrathin Si/Ge amorphous layers

Cesare Frigeri*, Miklós Serényi, Nguyen Quoc Khánh, Attila Csik, Ferenc Riesz, Zoltán Erdélyi, Lucia Nasi, Dezső László Beke and Hans-Gerd Boyen

Nanoscale Research Letters 2011, 6:189  doi:10.1186/1556-276X-6-189

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