|
Resolution: standard / high Figure 1.
Schematic diagram depiction of the ZnO patterning process using the polymer template
formed by nanoimprint lithography: (a) PMMA coating, (b) resin coating pattern, (c) stamp fabrication, (d) imprint process, (e) demolding, (f) residual layer removing, (g) OTS self assembly monolayer, (h) PR removal and ZnO seed layer coating, (i) annealing and O2 plasma treatment, and (j) ZnO growing.
Jung and Lee Nanoscale Research Letters 2011 6:159 doi:10.1186/1556-276X-6-159 |
