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Nanoscale electro-structural characterisation of ohmic contacts formed on p-type implanted 4H-SiC

Alessia Frazzetto, Filippo Giannazzo, Raffaella Lo Nigro, Salvatore Di Franco, Corrado Bongiorno, Mario Saggio, Edoardo Zanetti, Vito Raineri and Fabrizio Roccaforte*

Nanoscale Research Letters 2011, 6:158  doi:10.1186/1556-276X-6-158

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