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Resolution: standard / high Figure 3.
Effect of sublayer thickness and total thickness of SiNx on the PL spectrum on RTA. (Inset: comparison between the SRSO/SiO2 annealed at 1 h-1100°C and SRSO/SiNx structure subjected to RTA).
Nalini et al. Nanoscale Research Letters 2011 6:156 doi:10.1186/1556-276X-6-156 |
