New Si-based multilayers for solar cell applications
CIMAP UMR CNRS/CEA/ENSICAEN/UCBN, 6 Bd. Maréchal Juin, 14050 Caen Cedex 4, France
Nanoscale Research Letters 2011, 6:156 doi:10.1186/1556-276X-6-156Published: 18 February 2011
In this article, we have fabricated and studied a new multilayer structure Si-SiO2/SiNx by reactive magnetron sputtering. The comparison between SiO2 and SiNx host matrices in the optical properties of the multilayers is detailed. Structural analysis was made on the multilayer structures using Fourier transform infrared spectroscopy. The effect of specific annealing treatments on the optical properties is studied and we report a higher visible luminescence with a control over the thermal budget when SiO2 is replaced by the SiNx matrix. The latter seems to be a potential candidate to replace the most sought SiO2 host matrix.