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Study of the formation processes of gold droplet arrays on Si substrates by high temperature anneals

Alla Klimovskaya, Andrey Sarikov*, Yury Pedchenko, Andrey Voroshchenko, Oksana Lytvyn and Alexandr Stadnik

Author Affiliations

1V. Lashkarev Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, 41 Nauki Avenue, 03028 Kiev, Ukraine

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Nanoscale Research Letters 2011, 6:151  doi:10.1186/1556-276X-6-151

Published: 16 February 2011


In this study, the peculiarities of the transformations of gold films deposited on the Si wafer surfaces as a result of high temperature anneals are investigated experimentally depending on the conditions of wafer surface preparation and the annealing regimes. The morphology and the distribution functions of the crystallites of gold films as well as the gold droplets formed as a result of anneals are studied as functions of annealing temperature, type of annealing (rapid thermal or rapid furnace annealing), and the state of the surface of Si wafers. The results obtained can be used for the controlled preparation of the arrays of catalytic gold droplets for subsequent growth of Si wire-like crystals.