C-AFM scans. Schematic of the C-AFM measurement setup (a) used to measure conductivity changes in a sample locally treated with CHF3 plasma (on lithographically defined stripes) and annealed at 400°C. AFM morphology (b) and C-AFM transversal current map (c) of the sample.
Greco et al. Nanoscale Research Letters 2011 6:132 doi:10.1186/1556-276X-6-132