Table 1

Thicknesses of the Al₂O₃ and SiO₂ layers obtained from X-ray reflectrometry on the amorphous and polycrystalline samples

Phase

Al₂O₃ thickness (nm)

SiO₂ thickness (nm)

EOT (nm)

Amorphous

14.6

1.0

7.3

Polycrystalline

12.4

1.2

6.6

The EOT was estimated by considering a permittivity of 9.1 for the Al₂O₃ layer.

Lanza et al. Nanoscale Research Letters 2011 6:108   doi:10.1186/1556-276X-6-108