Table 1

Thicknesses of the Al2O3 and SiO2 layers obtained from X-ray reflectrometry on the amorphous and polycrystalline samples

Phase

Al2O3 thickness (nm)

SiO2 thickness (nm)

EOT (nm)


Amorphous

14.6

1.0

7.3

Polycrystalline

12.4

1.2

6.6


The EOT was estimated by considering a permittivity of 9.1 for the Al2O3 layer.

Lanza et al. Nanoscale Research Letters 2011 6:108   doi:10.1186/1556-276X-6-108

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