Nanogrids and Beehive-Like Nanostructures Formed by Plasma Etching the Self-Organized SiGe Islands

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Yuan-Ming Chang, Sheng-Rui Jian^* and Jenh-Yih Juang

Nanoscale Research Letters 2010, 5:1456-1463 doi:10.1007/s11671-010-9661-7

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