A Rotating-Tip-Based Mechanical Nano-Manufacturing Process: Nanomilling
Department of Mechanical Engineering, Carnegie Mellon University, Pittsburgh, PA, 15213, USA
Nanoscale Research Letters 2010, 5:1403-1407 doi:10.1007/s11671-010-9653-7Published: 25 June 2010
We present a rotating-tip-based mechanical nanomanufacturing technique, referred to here as nanomilling. An atomic force microscopy (AFM) probe tip that is rotated at high speeds by out-of-phase motions of the axes of a three-axis piezoelectric actuator is used as the nanotool. By circumventing the high-compliance AFM beam and directly attaching the tip onto the piezoelectric actuator, a high-stiffness arrangement is realized. The feeding motions and depth prescription are provided by a nano-positioning stage. It is shown that nanomilling is capable of removing the material in the form of long curled chips, indicating shearing as the dominant material removal mechanism. Feature-size and shape control capabilities of the method are demonstrated.