Figure 5.

Nanocavities obtained by FIB drilling at 30 kV with 1 pA nominal current. Left figure: a circular pattern with SCM used to drill cavities with nominal diameters of 60, 90 and 120 nm, respectively (from right to left). Right figure: a circular pattern with serial milling with a through hole of 100 nm (left) and a circular cavity of 60 nm (right), respectively. (Ion images HFW 2.84 μm and 1.97 μm)

Magni and Milani Nanoscale Research Letters 2010 5:1182-1189   doi:10.1007/s11671-010-9623-0