Figure 1.

Left: Attempts to achieve a single-sphere removal using different strategies with a standard FIB milling (i.e., without water vapor injection for CE milling). The recipes for M1,M2, M3 and M4 are reported in the text. Right S1: Another attempt to achieve a single-sphere removal without SCM; S2: a successful attempt which employs the SCM option. In the inset, S3: a further improvement of the recipe in S2 that achieves the sphere removal in 50 s (Both ion images with a Horizontal-Field Width [HFW] of 8.53 μm; inset: ion image, bar 500 nm)

Magni and Milani Nanoscale Research Letters 2010 5:1182-1189   doi:10.1007/s11671-010-9623-0