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A New Method for Lift-off of III-Nitride Semiconductors for Heterogeneous Integration

KeYan Zang*, DavyWC Cheong*, HongFei Liu, Hong Liu, JingHua Teng and SooJin Chua

Nanoscale Research Letters 2010, 5:1051-1056 doi:10.1007/s11671-010-9601-6

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