Seedless Pattern Growth of Quasi-Aligned ZnO Nanorod Arrays on Cover Glass Substrates in Solution
1 School of Semiconductor and Chemical Engineering, Department of BIN Technology, and Nanomaterials Processing Research Centre, Chonbuk National University, Jeonju, 561-756, South Korea
2 Faculty of Engineering, Toyama University, 3190 Gofuku, Toyama, 930-8555, Japan
Nanoscale Research Letters 2009, 5:669-674 doi:10.1007/s11671-009-9504-6Published: 27 December 2009
A hybrid technique for the selective growth of ZnO nanorod arrays on wanted areas of thin cover glass substrates was developed without the use of seed layer of ZnO. This method utilizes electron-beam lithography for pattern transfer on seedless substrate, followed by solution method for the bottom-up growth of ZnO nanorod arrays on the patterned substrates. The arrays of highly crystalline ZnO nanorods having diameter of 60 ± 10 nm and length of 750 ± 50 nm were selectively grown on different shape patterns and exhibited a remarkable uniformity in terms of diameter, length, and density. The room temperature cathodluminescence measurements showed a strong ultraviolet emission at 381 nm and broad visible emission at 585–610 nm were observed in the spectrum.