Figure 3.
Developed pattern in the bi-layer resist stack of ZEP-520A/PMGI, whose profile corresponds
to Fig. 2b
Saydur Rahman and Cui Nanoscale Research Letters 2010 5:545 doi:10.1007/s11671-010-9540-2 |
Figure 3.
Developed pattern in the bi-layer resist stack of ZEP-520A/PMGI, whose profile corresponds
to Fig. 2b
Saydur Rahman and Cui Nanoscale Research Letters 2010 5:545 doi:10.1007/s11671-010-9540-2 |
