Figure 5.
a SEM image of an Al2O3 thin film (20 nm) deposited on a Si substrate and simultaneously drilled by the near-field
enhancement of a single nanosecond laser pulse, which is produced by a lattice of
SiO2 spheres (R = 250 nm); b AFM image and c depth profile of gold nanodots created on silicon substrates by the LF-PAM-based
process
Kabashin et al. Nanoscale Research Letters 2010 5:454 doi:10.1007/s11671-010-9543-z |
