Figure 1.

Schematic (left) and real (right) images on fabrication of a ZnO NRA sensor. a As-synthesized ZnO NRA on a Pt-coated Si (001) substrate. b ZnO NRA filled and coated with positive PR. c Exposure of the tip-ends of ZnO nanorods by etching with inductively coupled plasma in oxygen atmosphere. d Deposition of Ni (~ 500 nm)/Au (~ 50 nm) metal layers by thermal evaporation using a mask and subsequent removal of remaining PR by dipping in acetone. The inset in the right part of d shows a bird-view of the electrode part

Park et al. Nanoscale Research Letters 2009 5:353-359   doi:10.1007/s11671-009-9487-3