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Fabrication of a Highly Sensitive Chemical Sensor Based on ZnO Nanorod Arrays

JaeYoung Park, Sun-Woo Choi and SangSub Kim*

Author Affiliations

School of Materials Science and Engineering, Inha University, Incheon, 402-751, Korea

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Nanoscale Research Letters 2009, 5:353-359  doi:10.1007/s11671-009-9487-3

Published: 18 November 2009


We report a novel method for fabricating a highly sensitive chemical sensor based on a ZnO nanorod array that is epitaxially grown on a Pt-coated Si substrate, with a top–top electrode configuration. To practically test the device, its O2 and NO2 sensing properties were investigated. The gas sensing properties of this type of device suggest that the approach is promising for the fabrication of sensitive and reliable nanorod chemical sensors.

ZnO nanorod array; Chemical sensor; MOCVD