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Profile Prediction and Fabrication of Wet-Etched Gold Nanostructures for Localized Surface Plasmon Resonance

Xiaodong Zhou*, Nan Zhang and Christina Tan

Author Affiliations

Institute of Materials Research and Engineering (IMRE), A*STAR (Agency for Science, Technology and Research), 3, Research Link, Singapore, 117602, Singapore

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Nanoscale Research Letters 2009, 5:344-352  doi:10.1007/s11671-009-9486-4

Published: 13 November 2009


Dispersed nanosphere lithography can be employed to fabricate gold nanostructures for localized surface plasmon resonance, in which the gold film evaporated on the nanospheres is anisotropically dry etched to obtain gold nanostructures. This paper reports that by wet etching of the gold film, various kinds of gold nanostructures can be fabricated in a cost-effective way. The shape of the nanostructures is predicted by profile simulation, and the localized surface plasmon resonance spectrum is observed to be shifting its extinction peak with the etching time.

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Electronic supplementary material. The online version of this article (doi:10.1007/s11671-009-9486-4) contains supplementary material, which is available to authorized users.

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Localized surface plasmon resonance (LSPR); Nanosphere lithography (NSL); Nanofabrication; Plasmonics; Nanoparticles; Profile simulation