Table 1

Ge content x on patterned and unpatterned regions for a range of deposition thicknesses and growth rates
Thickness (nm) Growth rate (nm/s) Temperature (°C) x Ge on patterned area (%) x Ge on flat (%)
3.2 0.1 750 0.51 ± 2 0.48 ± 2
0.9 0.1 750 0.44 ± 1 0.45 ± 6
2.8 0.1 750 0.52 ± 2 0.46 ± 1
2.8 0.015 750 0.51 ± 2 0.55 ± 4

The error bars refer to the single measurement. The data reported were acquired from close to the centers of patterned grids of pits

Bollani et al.

Bollani et al. Nanoscale Research Letters 2010 5:1917-1920   doi:10.1007/s11671-010-9773-0

Open Data