Table 1
Ge content x on patterned and unpatterned regions for a range of deposition thicknesses and growth rates
Thickness (nm)	Growth rate (nm/s)	Temperature (°C)	x Ge on patterned area (%)	x Ge on flat (%)
3.2	0.1	750	0.51 ± 2	0.48 ± 2
0.9	0.1	750	0.44 ± 1	0.45 ± 6
2.8	0.1	750	0.52 ± 2	0.46 ± 1
2.8	0.015	750	0.51 ± 2	0.55 ± 4

The error bars refer to the single measurement. The data reported were acquired from close to the centers of patterned grids of pits

Bollani et al. Nanoscale Research Letters 2010 5:1917   doi:10.1186/1556-276X-5-1917