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Ordered Arrays of SiGe Islands from Low-Energy PECVD

M Bollani*, E Bonera, D Chrastina, A Fedorov, V Montuori, A Picco, A Tagliaferri, G Vanacore and R Sordan

Nanoscale Research Letters 2010, 5:1917-1920  doi:10.1007/s11671-010-9773-0

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