Atomic Layer Deposition of ZnO on Multi-walled Carbon Nanotubes and Its Use for Synthesis of CNT–ZnO Heterostructures

XL Li1, C Li2, Y Zhang2, DP Chu2, WI Milne2 and HJ Fan1*

Author affiliations

1 Division of Physics and Applied Physics, School of Physical and Mathematical Sciences, Nanyang Technological University, 21 Nanyang Link, Singapore, 637371, Singapore

2 Electrical Engineering Division, Engineering Department, University of Cambridge, 9 JJ Thomson Avenue, CB3 0FA, Cambridge, UK

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Citation and License

Nanoscale Research Letters 2010, 5:1836-1840  doi:10.1007/s11671-010-9721-z

Published: 7 August 2010


In this article, direct coating of ZnO on PECVD-grown multi-walled carbon nanotubes (MWCNTs) is achieved using atomic layer deposition (ALD). Transmission electron microscopy investigation shows that the deposited ZnO shell is continuous and uniform, in contrast to the previously reported particle morphology. The ZnO layer has a good crystalline quality as indicated by Raman and photoluminescence (PL) measurements. We also show that such ZnO layer can be used as seed layer for subsequent hydrothermal growth of ZnO nanorods, resulting in branched CNT–inorganic hybrid nanostructures. Potentially, this method can also apply to the fabrication of ZnO-based hybrid nanostructures on other carbon nanomaterials.

ZnO; Atomic layer deposition; Carbon nanotubes; Hybrid nanomaterials; Hydrothermal; Solar cells