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Nanoscratch Characterization of GaN Epilayers on c- and a-Axis Sapphire Substrates

Meng-Hung Lin, Hua-Chiang Wen*, Yeau-Ren Jeng and Chang-Pin Chou

Nanoscale Research Letters 2010, 5:1812-1816  doi:10.1007/s11671-010-9717-8

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