Table 1

Atomic coordinates used to model the HfO2unit cell
Method T(°C) Time (h) Lattice parameter (Å) Unit cell volume (Å3) Ref. [ ]
a b c
ALD 5.1 5.2 5.3 140.556 [54]
PIAD 550 3 5.09 5.15 5.24 137.358(7) [55]
LDA 5.106 5.165 5.281 139.273(1) [56]
MH 140 1 5.160(2) 5.179(2) 5.311(1) 66.528(5) []
JCPDS 5.285(1) 5.181(9) 5.115(7) 140.102(9) [52]

Ttemperature,ttime,Ref. references,PIADPlasma ion assisted deposition,ALDatomic layer deposition,LDAlocal-density approximation, and [] This work

Eliziário et al.

Eliziário et al. Nanoscale Research Letters 2009 4:1371-1379   doi:10.1007/s11671-009-9407-6

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