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A Novel Self-aligned and Maskless Process for Formation of Highly Uniform Arrays of Nanoholes and Nanopillars

Wei Wu, Dibyendu Dey, Omer G Memis, Alex Katsnelson and Hooman Mohseni*

Nanoscale Research Letters 2008, 3:123-127  doi:10.1007/s11671-008-9124-6