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Photolithographic Approaches for Fabricating Highly Ordered Nanopatterned Arrays

Xiaoru Li, Guojun Song*, Zhi Peng, Xilin She, Jianjiang Li, Jin Sun, Di Zhou, Peidong Li and Zengjun Shao

Author Affiliations

Institute of Polymer Materials, Qingdao University, No. 308 Ningxia Road, Qingdao, 266071, People’s Republic of China

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Nanoscale Research Letters 2008, 3:521-523  doi:10.1007/s11671-008-9190-9

Published: 30 October 2008


In this work, we report that large area metal nanowire and polymer nanotube arrays were successfully patterned by photolithographic approach using anodic aluminum oxide (AAO) templates. Nanowires were produced by electrochemical deposition, and nanotubes by solution-wetting. The highly ordered patterns of nanowire and nanotube arrays were observed using scanning electron microscopy (SEM) and found to stand free on the substrate. The method is expected to play an important role in the application of microdevices in the future.

Pattern; AAO; Photolithographic approach; Nanowire arrays; Nanotube arrays