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Physical Behavior of Nanoporous Anodic Alumina Using Nanoindentation and Microhardness Tests

Te-Hua Fang12*, TongHong Wang3, Chien-Hung Liu2, Liang-Wen Ji2 and Shao-Hui Kang1

Author Affiliations

1 Institute of Mechanical and Electromechanical Engineering, National Formosa University, Yunlin, 632, Taiwan

2 Institute of Electro-Optical and Materials Science, National Formosa University, Yunlin, 632, Taiwan

3 Thermal Laboratory, Advanced Semiconductor Engineering, Inc., Kaohsiung, 811, Taiwan

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Nanoscale Research Letters 2007, 2:410-415  doi:10.1007/s11671-007-9076-2

Published: 19 July 2007


In this paper, the mechanical response and deformation behavior of anodic aluminum oxide (AAO) were investigated using experimental nanoindentation and Vickers hardness tests. The results showed the contact angle for the nanoporous AAO specimen was 105° and the specimen exhibited hydrophobic behavior. The hardness and the fracture strength of AAO were discussed and a three-dimensional finite element model (FEM) was also conducted to understand the nanoindentation-induced mechanism.

Nanoindentation; Anodic aluminum oxide (AAO); Porosity; Hardness; Finite element method (FEM)