Open Access Nano Express

Site-controlled quantum dots fabricated using an atomic-force microscope assisted technique

HZ Song1*, T Usuki1, T Ohshima1, Y Sakuma2, M Kawabe2, Y Okada3, K Takemoto1, T Miyazawa1, S Hirose1, Y Nakata1, M Takatsu1 and N Yokoyama1

Author Affiliations

1 Nanotechnology Research center, Fujitsu Lab. Ltd., Morinosato-Wakamiya 10-1, Atsugi, Kanagawa, 243-0197, Japan

2 Nanomaterials Laboratory, National Institute for Materials Science (NIMS), Tsukuba, Ibaraki, Japan

3 Institute of Applied Physics, University of Tsukuba, Tsukuba, Ibaraki, 305-8773, Japan

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Nanoscale Research Letters 2006, 1:160-166  doi:10.1007/s11671-006-9012-x


The electronic version of this article is the complete one and can be found online at:


Published:3 August 2006

© 2006 to the authors

Abstract

An atomic-force microscope assisted technique is developed to control the position and size of self-assembled semiconductor quantum dots (QDs). Presently, the site precision is as good as ± 1.5 nm and the size fluctuation is within ± 5% with the minimum controllable lateral diameter of 20 nm. With the ability of producing tightly packed and differently sized QDs, sophisticated QD arrays can be controllably fabricated for the application in quantum computing. The optical quality of such site-controlled QDs is found comparable to some conventionally self-assembled semiconductor QDs. The single dot photoluminescence of site-controlled InAs/InP QDs is studied in detail, presenting the prospect to utilize them in quantum communication as precisely controlled single photon emitters working at telecommunication bands.

Keywords:
Quantum dot; Site-Control; Atomic-force microscope; Local oxidation; Quantum computer; Quantum communication

Nano Express

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References

  1. Bimberg D, Grundmann M, Ledentsov NN: Quantum Dot Heterostructures. Widley, New York; 1999. OpenURL

  2. Sakaki H:

    Jpn. J. Appl. Phys.. 1989, 28:L314. Publisher Full Text OpenURL

  3. Takagahara T:

    Surf. Sci.. 1992, 267:310.

    COI number [1:CAS:528:DyaK38XisVCksrw%3D]

    Publisher Full Text OpenURL

  4. Song HZ, Akahane K, Lan S, Xu HZ, Okada Y, Kawabe M:

    Phys. Rev. B. 2001, 64:085303. Publisher Full Text OpenURL

  5. Bonadeo NH, Erland J, Gammon D, Park D, Katzer DS, Steel DG:

    Science. 1998, 282:1473.

    COI number [1:CAS:528:DyaK1cXns1ymsro%3D]

    Publisher Full Text OpenURL

  6. Besombes L, Baumberg JJ, Motohisa J:

    Phys. Rev. Lett.. 2003, 90:257402.

    COI number [1:STN:280:DC%2BD3szivVGgtw%3D%3D]

    Publisher Full Text OpenURL

  7. Santori C, Fattal D, Vučković J, Solomon GS, Yamamoto Y:

    Nature. 2002, 419:594.

    COI number [1:CAS:528:DC%2BD38Xns1Ont78%3D]

    Publisher Full Text OpenURL

  8. Yuan Z, Kardynal BE, Stevenson RM, Shields AJ, Lobo CJ, Cooper K, Beattie NS, Ritchie DA, Pepper M:

    Science. 2002, 295:102.

    COI number [1:CAS:528:DC%2BD38XksVeruw%3D%3D]

    Publisher Full Text OpenURL

  9. Loss D, DiVincenzo DP:

    Phys. Rev. A. 1998, 57:120.

    COI number [1:CAS:528:DyaK1cXitlamug%3D%3D]

    Publisher Full Text OpenURL

  10. Ishikawa T, Nishimura T, Kohmoto S, Asakawa K:

    Appl. Phys. Lett.. 2000, 76:167.

    COI number [1:CAS:528:DC%2BD3cXitFWrtg%3D%3D]

    Publisher Full Text OpenURL

  11. Lee H, Johnson JA, He MY, Speck JS, Petroff PM:

    Appl. Phys. Lett.. 2001, 78:105.

    COI number [1:CAS:528:DC%2BD3MXmvVCm]

    Publisher Full Text OpenURL

  12. Chithrani D, Williams RL, Lefebvre J, Poole PJ, Aers GC:

    Appl. Phys. Lett.. 2004, 84:978.

    COI number [1:CAS:528:DC%2BD2cXhtVGms7Y%3D]

    Publisher Full Text OpenURL

  13. Keyser UF, Schumacher HW, Zeitler U, Haug RJ, Zberl K:

    Appl. Phys. Lett.. 2000, 76:457.

    COI number [1:CAS:528:DC%2BD3cXlvVaqtQ%3D%3D]

    Publisher Full Text OpenURL

  14. Song HZ, Nakata Y, Okada Y, Miyazawa T, Ohshima T, Takatsu M, Kawabe M, Yokoyama N:

    Phys. E. 2004, 21:625.

    COI number [1:CAS:528:DC%2BD2cXitlKjtb8%3D]

    Publisher Full Text OpenURL

  15. Song HZ, Usuki T, Hirose S, Takemoto K, Nakata Y, Yokoyama N, Sakuma Y:

    Appl. Phys. Lett.. 2005, 86:113118. Publisher Full Text OpenURL

  16. Hirai A, Itoh KM:

    Physica E. 2004, 23:248.

    COI number [1:CAS:528:DC%2BD2cXlvFCrtbs%3D]

    Publisher Full Text OpenURL

  17. Okada Y, Iuchi Y, Kawabe M, Harris JS:

    J. Appl. Phys.. 2000, 88:1136.

    COI number [1:CAS:528:DC%2BD3cXksV2itb8%3D]

    Publisher Full Text OpenURL

  18. Wang ZhM, Mazur YI, Seydmohamadi Sh, Salamo GJ, Kissel H:

    Appl. Phys. Lett.. 2005, 87:213105. Publisher Full Text OpenURL

  19. Song HZ, Lan S, Akahane K, Jang KY, Okada Y, Kawabe M:

    Solid State Communications. 2000, 115:195.

    COI number [1:CAS:528:DC%2BD3cXkt1artLw%3D]

    Publisher Full Text OpenURL

  20. Huffaker DL, Deppe DG:

    Appl. Phys. Lett.. 1998, 73:366.

    COI number [1:CAS:528:DyaK1cXks12isLo%3D]

    Publisher Full Text OpenURL

  21. Ohshima T, Song HZ, Okada Y, Akahane K, Miyazawa T, Kawabe M, Yokoyama N:

    Phys. Stat. Sol. (c). 2003, 4:1364. Publisher Full Text OpenURL

  22. Ohshima T:

    Phy. Rev. A. 2000, 62:062316. Publisher Full Text OpenURL

  23. Takemoto K, Sakuma Y, Hirose S, Usuki T, Yokoyama N:

    Jpn. J. Appl. Phys. (part B). 2004, 43:L349.

    COI number [1:CAS:528:DC%2BD2cXivFaru7s%3D]

    Publisher Full Text OpenURL

  24. Takemoto K, Sakuma Y, Hirose S, Usuki T, Yokoyama N, Miyazawa T, Takatsu M, Arakawa Y:

    Jpn J. Appl. Phys. (part B). 2004, 43:L993.

    COI number [1:CAS:528:DC%2BD2cXmtlGjtbY%3D]

    Publisher Full Text OpenURL

  25. Panranthoen C, Bertru N, Dehaese O, LeCorre A, Loualiche S, Lambert B, Patriarche G:

    Appl. Phys. Lett.. 2001, 78:1751. Publisher Full Text OpenURL

  26. Raymond S, Studenikin S, Cheng SJ, Pioro-Ladrière M, Ciorga M, Poole PJ, Robertson MD:

    Semicond. Sci. Technol.. 2003, 18:385.

    COI number [1:CAS:528:DC%2BD3sXjtl2gtLY%3D]

    Publisher Full Text OpenURL

  27. Sakuma Y, Takemoto K, Hirose S, Usuki T, Yokoyama N:

    Physica E. 2005, 26:81.

    COI number [1:CAS:528:DC%2BD2MXht1Ontrs%3D]

    Publisher Full Text OpenURL

  28. Sakuma Y, Takeguchi M, Takemoto K, Hirose S, Usuki T, Yokoyama N:

    J. Vac. Sci. Technol. B. 2005, 23:1741.

    COI number [1:CAS:528:DC%2BD2MXntFSjs7c%3D]

    Publisher Full Text OpenURL

  29. Yokoi T, Adachi S, Sasakura H, Muto S, Song HZ, Usuki T, Hirose S:

    Phys. Rev. B. 2005, 71:041307R. Publisher Full Text OpenURL

  30. Feng W, Wang Y, Wang J, Ge WK, Huang Q, Zhou JM:

    Appl. Phys. Lett.. 1998, 72:1463.

    COI number [1:CAS:528:DyaK1cXhsl2rs7o%3D]

    Publisher Full Text OpenURL

  31. Karlsson KF, Moskalenko ES, Holtz PO, Monemar B, Schoenfled WV, Garcia JM, Petroff PM:

    Appl. Phys. Lett.. 2001, 78:2952.

    COI number [1:CAS:528:DC%2BD3MXjt1ejtb4%3D]

    Publisher Full Text OpenURL

  32. Ignatiev VI, Kozin EI, Nair SV, Ren HW, Sugou S, Masumoto Y:

    Phys. Rev. B. 2000, 61:15633.

    COI number [1:CAS:528:DC%2BD3cXktV2murY%3D]

    Publisher Full Text OpenURL

  33. Pepper M:

    J. Phys. C. 1980, 13:L709.

    COI number [1:CAS:528:DyaL3MXhtVeksQ%3D%3D]

    Publisher Full Text OpenURL

  34. Kimura S, Kumano H, Endo M, Suemune I, Yokoi T, Sasakura H, Adachi S, Muto S, Song HZ, Hirose S, Usuki T:

    Jpn. J. Appl. Phys.. 2005, 44:L793.

    COI number [1:CAS:528:DC%2BD2MXmvVemsbg%3D]

    Publisher Full Text OpenURL